CORRELATION OF STRESS WITH LIGHT-INDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引：10

作者：

KURTZ, SR

TSUO, YS

TSU, R

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 15期

关键词：

D O I：

10.1063/1.97493

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：951 / 953

页数：3

共 17 条

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