STRUCTURE AND PREFERRED ORIENTATIONS IN ION-PLATED NIOBIUM FILMS AND CORRELATION OF THE SUBSTRATE BIAS VOLTAGE WITH CALCULATED STRAIN ENERGIES

被引：2

作者：

DATTA, PK

STRAFFORD, KN

LIN, DS

WARD, LP

HILL, R

RUSSELL, GJ

机构：

[1] NEWCASTLE UPON TYNE POLYTECH, SCH PHYS & OPTOELECTR, NEWCASTLE UPON TYNE NE2 1XE, ENGLAND

[2] UNIV DURHAM, DEPT APPL PHYS & ELECTR, DURHAM DH1 3HP, ENGLAND

来源：

THIN SOLID FILMS | 1989年 / 168卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90008-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：221 / 230

页数：10

共 21 条

[1] RELATIONSHIP BETWEEN STRUCTURE AND SPUTTERING PARAMETERS IN NBN FILMS [J].

ALESSANDRINI, EI ;

SADAGOPAN, V ;

LAIBOWITZ, RB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01) :188-+

[2]

DATTA PK, IN PRESS

[3]

EDWARDS WT, 1963, CORROSION, V1

[4] INTERACTION OF OXYGEN AND NITROGEN WITH NIOBIUM (100) SURFACE .1. MORPHOLOGY [J].

FARRELL, HH ;

STRONGIN, M .

SURFACE SCIENCE, 1973, 38 (01) :18-30

[5] PREPARATION AND CHARACTERIZATION OF THIN-FILMS OF NBO2 [J].

GALLEGO, JM ;

THOMAS, CB .

THIN SOLID FILMS, 1982, 98 (01) :11-22

[6] TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF ELECTRON-BEAM CO-EVAPORATED NB3SN-CU SUPERCONDUCTING COMPOSITES [J].

JACOBSON, BE ;

HAMMOND, RH ;

GEBALLE, TH ;

SALEM, JR .

THIN SOLID FILMS, 1978, 54 (02) :243-258

[7] MODEL OF BIAS SPUTTERING APPLIED TO CONTROL OF NB FILM PROPERTIES [J].

KAY, E ;

HEIM, G .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (09) :4862-4867

[8] ANALYTICAL GROWTH MECHANISMS OF UNIAXIALLY ORIENTED FILMS IN ION-BASED PROCESSES [J].

MATSUBARA, K ;

FUKUMOTO, Y ;

TAKAGI, T .

THIN SOLID FILMS, 1982, 92 (1-2) :65-70

[9]

MOVCHAN BA, 1969, PHYS METALS METALLOG, V28, P83

[10] PREFERRED ORIENTATION OF ZNO FILMS CONTROLLED BY RF SPUTTERING [J].

MURTI, DK ;

BLUHM, TL .

THIN SOLID FILMS, 1982, 87 (01) :57-61

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