EUTECTIC MELTING BY PULSED ION-BEAM IRRADIATION

被引：18

作者：

FASTOW, R

MAYER, JW

BRAT, T

EIZENBERG, M

OLOWOLAFE, JO

机构：

[1] TECHNION ISRAEL INST TECHNOL, DEPT MAT ENGN, IL-32000 HAIFA, ISRAEL

[2] UNIV IFE, DEPT PHYS, ILE IFE, NIGERIA

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 11期

关键词：

D O I：

10.1063/1.95756

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1052 / 1054

页数：3

共 15 条

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ALLMEN, MV ;

WITTMER, M .

APPLIED PHYSICS LETTERS, 1979, 34 (01) :68-70

[2] PULSED PROTON-BEAM ANNEALING - SEMICONDUCTORS AND SILICIDES [J].

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NERI, JM ;

HAMMER, DA ;

CHEN, LJ .

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[3] EPITAXIAL NISI2 FORMATION BY PULSED ION-BEAM ANNEALING [J].

CHEN, LJ ;

HUNG, LS ;

MAYER, JW ;

BAGLIN, JEE ;

NERI, JM ;

HAMMER, DA .

APPLIED PHYSICS LETTERS, 1982, 40 (07) :595-597

[4] PULSED ION-BEAM MELTING OF SILICON [J].

FASTOW, R ;

MARON, Y ;

MAYER, J .

PHYSICAL REVIEW B, 1985, 31 (02) :893-898

[5]

FASTOW R, 1985, THESIS CORNELL U

[6] ION-BEAM MIXING OF METAL-SEMICONDUCTOR EUTECTIC SYSTEMS [J].

LAU, SS ;

TSAUR, BY ;

VONALLMEN, M ;

MAYER, JW ;

STRITZKER, B ;

WHITE, CW ;

APPLETON, B .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :97-105

[7]

LAU SS, 1980, LASER ELECTRON BEAM, P511

[8]

PALMSTROM CJ, 1982, LASER SOLID INTERACT, P715

[9] LASER-INDUCED REACTIONS OF PLATINUM AND OTHER METAL-FILMS WITH SILICON [J].

POATE, JM ;

LEAMY, HJ ;

SHENG, TT ;

CELLER, GK .

APPLIED PHYSICS LETTERS, 1978, 33 (11) :918-920

[10]

Sigmon T. W., 1981, Laser and Electron-Beam Solid Interactions and Materials Processing. Proceedings of the Materials Research Society Symposium, P511

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