GROWTH-CHARACTERISTICS OF A VERTICAL ROTATING-DISK OMVPE REACTOR

被引：52

作者：

WANG, CA

PATNAIK, S

CAUNT, JW

BROWN, RA

机构：

[1] MIT, United States

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 93卷 / 1-4期

关键词：

teer. We are especially grateful to D.M. Tracy for assistance in epitaxial growth and to J.M. Chlud-zinski for the PL measurements. Th~ Lincoln Laboratory portion of this work was sponsored by the Department of the Navy for SDIO and the Department of Chemical Engineering portion by the Air Force Office of Scientific Research;

D O I：

10.1016/0022-0248(88)90532-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

17

引用

收藏

页码：228 / 234

页数：7

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