共 9 条
[1]
KINETICS OF FORMATION AND PROPERTIES OF EPITAXIAL COSI2 FILMS ON SI (111)
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (02)
:770-773
[2]
GARCIN P, COMMUNICATION
[4]
DOUBLE CORRELATION TECHNIQUE (DDLTS) FOR ANALYSIS OF DEEP LEVEL PROFILES IN SEMICONDUCTORS
[J].
APPLIED PHYSICS,
1977, 12 (01)
:45-53
[5]
NICOLLIAN EH, 1977, THIN FILMS INTERDIFF, pCH13
[7]
SZE SM, 1980, PHYSICS SEMICONDUCTO, pCH3
[9]
TRANSITION-METALS IN SILICON
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1983, 30 (01)
:1-22