RAPID THERMAL ANNEALING OF INP USING GAAS AND INP PROXIMITY CAPS

被引：12

作者：

DELALAMO, JA

MIZUTANI, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 08期

关键词：

D O I：

10.1063/1.339316

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3456 / 3458

页数：3

共 28 条

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