SUBSTRATE-TEMPERATURE DEPENDENCE OF ELECTRON-DRIFT MOBILITY IN GLOW-DISCHARGED HYDROGENATED AMORPHOUS-SILICON

被引:10
作者
SHIRAFUJI, J
KUWAGAKI, M
INUISHI, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 03期
关键词
D O I
10.1143/JJAP.23.L184
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:L184 / L186
页数:3
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