INVESTIGATION OF THE INTERSTITIAL SITE IN AS+-ION-IMPLANTED GAAS BY MEANS OF A MULTIDIRECTIONAL AND HIGH-DEPTH RESOLUTION RBS CHANNELING TECHNIQUE

被引：15

作者：

NISHIZAWA, JI ^{[1
]}

SHIOTA, I ^{[1
]}

OYAMA, Y ^{[1
]}

机构：

[1] SEMICONDUCTOR RES INST,KAWAUCHI,SENDAI 980,JAPAN

来源：

JOURNAL OF PHYSICS C-SOLID STATE PHYSICS | 1986年 / 19卷 / 01期

关键词：

D O I：

10.1088/0022-3719/19/1/006

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：1 / 7

页数：7

共 11 条

[1]

Andersen J. U., 1971, Radiation Effects, V7, P25, DOI 10.1080/00337577108232561

[2] INTERSTITIAL PROPERTIES DEDUCED FROM INTERNAL-FRICTION MEASUREMENTS ON BORON-IMPLANTED SILICON [J].

FRANK, W .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 21 (02) :119-133

[3] CHARACTERIZATION OF STOICHIOMETRY IN GAAS BY X-RAY-INTENSITY MEASUREMENTS OF QUASI-FORBIDDEN REFLECTIONS [J].

FUJIMOTO, I .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05) :L287-L289

[4] DEPTH PROFILES OF FE AND CR IMPLANTS IN INP AFTER ANNEALING [J].

GAUNEAU, M ;

LHARIDON, H ;

RUPERT, A ;

SALVI, M .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) :6823-6827

[5] ION-IMPLANTATION AND LOW-TEMPERATURE EPITAXIAL REGROWTH OF GAAS [J].

GRIMALDI, MG ;

PAINE, BM ;

NICOLET, MA ;

SADANA, DK .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (06) :4038-4046

[6] GETTERING BY ION IMPLANTATION. [J].

Lecrosnier, D. .

Nuclear instruments and methods in physics research, 1983, 209-210 (Pt 1) :325-332

[7] EPR STUDY OF NEUTRON-IRRADIATED SILICON - POSITIVE CHARGE STATE OF (100) SPLIT DI-INTERSTITIAL [J].

LEE, YH ;

GERASIMENKO, NN ;

CORBETT, JW .

PHYSICAL REVIEW B, 1976, 14 (10) :4506-4520

[8]

NISHIZAWA J, 1986, UNPUB J PHYS D

[9] NONSTOICHIOMETRY OF TE-DOPED GAAS [J].

NISHIZAWA, JI ;

OTSUKA, H ;

YAMAKOSHI, S ;

ISHIDA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (01) :46-56

[10] SOLID-PHASE EPITAXIAL REGROWTH OF ION-IMPLANTED LAYERS IN GAAS [J].

NISSIM, YI ;

CHRISTEL, LA ;

SIGMON, TW ;

GIBBONS, JF ;

MAGEE, TJ ;

ORMOND, R .

APPLIED PHYSICS LETTERS, 1981, 39 (08) :598-600

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