OVERLAYER-INDUCED ENHANCED OXIDATION OF GAAS-SURFACES

被引：16

作者：

CHANG, S

RIZZI, A

CAPRILE, C

PHILIP, P

WALL, A

FRANCIOSI, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573818

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：799 / 805

页数：7

共 38 条

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