SYNTHESIS AND CHARACTERIZATION OF WATER-SOLUBLE DIAZONIUM SALTS AS CONTRAST-ENHANCEMENT MATERIALS

被引：2

作者：

LIU, JH

HER, CF

LIU, HT

CHUNG, YC

机构：

[1] Department of Chemical Engineering, National Cheng kung University, Tainan

来源：

ANGEWANDTE MAKROMOLEKULARE CHEMIE | 1995年 / 224卷

关键词：

D O I：

10.1002/apmc.1995.052240114

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

Water soluble aromatic diazonium double salts, p-diazodiphenylamine chloride zinc chloride (DZS-1) and p-diazoanisol chloride zinc chloride (DZS-2), have been evaluated as photobleachable dyes for contrast enhancement lithography. After testing the bleaching characteristics, aqueous solutions of DZS-1 and poly(vinyl alcohol) were used as a contrast enhancement material. Thermal stability, resist contrast, exposure parameters and other bleaching characteristics of the photobleachable membranes were investigated. A commercial i-line photoresist was used to evaluate the contrast ratio of the DZS-1/PVA CEL layer. The contrast ratio obtained in this investigation is 1.67.

引用

页码：133 / 144

页数：12

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