SURFACE-MORPHOLOGY OF GAAS LPE LAYERS - EFFECTS OF SUBSTRATE MISORIENTATION AND INITIAL SUPERCOOLING

The surface morphology of GsAs LPE layers grown on substrates misoriented by 0.06° to 10° from the (100) plane is studied. In growth from equilibrated solution, two characteristic morphologies appear depending on the misorientation terraces consisting of singular treads and risers when θ<1°, and ripples without singular faces when 1°. In growth from initially supercooled solution, the terraces and ripples disappear, and smooth planar surfaces can be obtained even on misoriented substrates. The development of these morphologies is also studied at the initial growth stage. © 1979 The Japan Society of Applied Physics.