OXYGEN REACTIVE ION ETCHING MECHANISMS OF ORGANIC AND ORGANO-SILICON POLYMERS

被引：27

作者：

JURGENSEN, CW

RAMMELSBERG, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.576143

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：3317 / 3324

页数：8

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