CHARACTERIZATION OF N-CHANNEL GERMANIUM MOSFET WITH GATE INSULATOR FORMED BY HIGH-PRESSURE THERMAL-OXIDATION

被引:8
作者
CRISMAN, EE [1 ]
LEE, JI [1 ]
STILES, PJ [1 ]
GREGORY, OJ [1 ]
机构
[1] UNIV RHODE ISL,DEPT CHEM ENGN,KINGSTON,RI 02881
关键词
D O I
10.1049/el:19870006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:8 / 10
页数:3
相关论文
共 7 条
[1]   THE OXIDATION OF GERMANIUM SURFACES AT PRESSURES MUCH GREATER THAN ONE ATMOSPHERE [J].
CRISMAN, EE ;
ERCIL, YM ;
LOFERSKI, JJ ;
STILES, PJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (08) :1845-1848
[2]   THE NITRIDATION OF THICK GERMANIUM OXIDE-FILMS ON SINGLE-CRYSTAL GERMANIUM [J].
CRISMAN, EE ;
GREGORY, OJ ;
STILES, PJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (08) :1896-1900
[3]   THIN GERMANIUM NITRIDE FILMS GROWN BY THERMAL-REACTION PROCESS [J].
HUA, Q ;
ROSENBERG, J ;
YE, J ;
YANG, ES .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) :8969-8973
[4]   STABLE GERMANIUM DIOXIDE FILMS ON GERMANIUM [J].
KUISL, M .
SOLID-STATE ELECTRONICS, 1972, 15 (05) :595-&
[5]  
LAW JT, 1957, SEMICONDUCTOR SURFAC, P383
[7]   LOW-TEMPERATURE THERMAL OXIDATION OF SILICON BY DRY OXYGEN-PRESSURE ABOVE 1-ATM [J].
ZETO, RJ ;
THORNTON, CG ;
HRYCKOWIAN, E ;
BOSCO, CD .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (10) :1409-1410