VOLUME EXPANSION OF ION-IMPLANTED DIAMOND

被引：37

作者：

MABY, EW

MAGEE, CW

MOREWOOD, JH

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 02期

关键词：

D O I：

10.1063/1.92645

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：157 / 158

页数：2

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[7] ION-IMPLANTATION INTO DIAMOND
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[8] VOLUME EXPANSION AND OXYGEN INCORPORATION IN DEUTERON-BOMBARDED SILICON
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