THE PLASMA OXIDATION OF TITANIUM THIN-FILMS TO FORM DIELECTRIC LAYERS

被引：21

作者：

BURNS, GP

BALDWIN, IS

HASTINGS, MP

WILKES, JG

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 06期

关键词：

D O I：

10.1063/1.344290

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2320 / 2324

页数：5

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