共 9 条
[2]
THE KINETICS AND ENERGETICS OF SPUTTERING INDUCED TOPOGRAPHY ON SOLIDS
[J].
RADIATION EFFECTS LETTERS,
1980, 50 (3-6)
:97-102
[3]
SPUTTERING INDUCED TOPOGRAPHY DEVELOPMENT ON FCC METALS
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1985, 38 (02)
:77-95
[4]
APPLICATION OF THE THERMODYNAMICS OF THE CAPILLARITY OF SOLIDS TO SURFACE-TOPOGRAPHY IN SPUTTERING
[J].
RADIATION EFFECTS LETTERS,
1979, 50 (01)
:23-26
[5]
CHERNOV AA, 1960, SOV PHYS-CRYSTALLOGR, V5, P423
[6]
Gelfand I. M., 1963, CALCULUS VARIATIONS
[7]
SIMULATION OF SURFACE EVOLUTION DURING ION-BOMBARDMENT
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1988, 6 (04)
:2434-2442
[8]
PRECISION MODELING OF THE MASK SUBSTRATE EVOLUTION DURING ION ETCHING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1988, 6 (04)
:2443-2450