共 18 条
[2]
IRON AND THE IRON-BORON COMPLEX IN SILICON
[J].
JOURNAL OF APPLIED PHYSICS,
1985, 57 (06)
:1941-1943
[4]
QUENCHED-IN DEFECT IN BORON-DOPED SILICON
[J].
JOURNAL OF APPLIED PHYSICS,
1977, 48 (11)
:4821-4822
[5]
GHANDHI SK, 1982, VLSI FABRICATION PRI, P650
[7]
Kimerling L. C., 1980, I PHYS C SER, V59, P217
[8]
ELECTRONICALLY CONTROLLED REACTIONS OF INTERSTITIAL IRON IN SILICON
[J].
PHYSICA B & C,
1983, 116 (1-3)
:297-300