A 500 KEV ION ACCELERATOR WITH 2 TYPES OF ION-SOURCE

被引：4

作者：

AGAWA, Y

TAKAI, M

NAMBA, S

UCHIYAMA, T

FUKUI, R

YAMAKAWA, H

机构：

[1] ULVAC JAPAN LTD,CHIGASAKI,KANAGAWA 253,JAPAN

[2] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 55卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(91)96220-F

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A 500 keV ion accelerator system equipped with a DISKTRON high voltage generator and two types of ion source has been developed to provide ion beams for RBS analysis with microbeams and surface modification. H+ and He+ beams focused to less than 1-mu-m with a voltage stability of less than 10(-4) have been obtained in a microbeam line. P+, As+ and other heavy ion beams of sufficient intensity for surface modification are also obtained. Uniformities of P+ and As+ ions implanted into a 2 in. Si wafer were evaluated to be 1.5% and 1.2%, respectively.

引用

页码：502 / 505

页数：4

共 9 条

[1] A 500 KEV ION-BEAM ACCELERATOR FOR MICROBEAM FORMATION [J].

AGAWA, Y ;

UCHIYAMA, T ;

HOSHINO, A ;

TSUBOI, H ;

FUKUI, R ;

TAKAGI, K ;

YAMAKAWA, H ;

MATSUO, T ;

TAKAI, M ;

NAMBA, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4) :540-542

[2] INFLUENCE OF BEAM CURRENT RIPPLE ON SECONDARY-ELECTRON AND RBS MAPPING IMAGES [J].

AGAWA, Y ;

TAKAI, M ;

ISHIBASHI, K ;

HIRAI, K ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (06) :L1011-L1014

[3]

IOSOYA A, 1985, NUCL INSTRUM METH B, V6, P250

[4] MICROPROBE USING FOCUSED 1.5 MEV HELIUM ION AND PROTON-BEAMS [J].

KINOMURA, A ;

TAKAI, M ;

INOUE, K ;

MATSUNAGA, K ;

IZUMI, M ;

MATSUO, T ;

GAMO, K ;

NAMBA, S ;

SATOU, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) :862-866

[5] INTERFACE OBSERVATION USING MEDIUM ENERGY ION-SCATTERING WITH HIGH-ENERGY RESOLUTION [J].

KOSHIKAWA, T ;

KIKUCHI, R ;

TAKAGI, K ;

UCHIYAMA, T ;

MIHARA, Y ;

AGAWA, Y ;

MATSUURA, S ;

INUZUKA, E ;

SUZUKI, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) :623-627

[6] THE DEVELOPMENT OF A 400 KEV ION ACCELERATOR FOR SURFACE STUDY AND ATOMIC COLLISION EXPERIMENTS [J].

MIHARA, Y ;

UCHIYAMA, T ;

AGAWA, Y ;

FUKUI, R ;

KATAGAWA, T ;

TSUKAKOSHI, O ;

ROSTEK, P ;

TSUBOI, H ;

TAKAGI, K ;

YAMAKAWA, H ;

KIKUCHI, R ;

ISOYA, A ;

KOSHIKAWA, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :609-611

[7] MICROBEAMLINE DESIGN FOR MEDIUM TO HIGH-ENERGY HELIUM ION-BEAMS [J].

TAKAI, M ;

MATSUO, T ;

NAMBA, S ;

INOUE, K ;

ISHIBASHI, K ;

KAWATA, Y .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :260-263

[8] INFLUENCE OF BEAM CURRENT FLUCTUATION ON SECONDARY-ELECTRON AND RBS MAPPING IMAGES [J].

TAKAI, M ;

AGAWA, Y ;

ISHIBASHI, K ;

HIRAI, K ;

NAMBA, S ;

INOUE, K ;

KAWATA, Y .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 54 (1-3) :279-283

[9]

TAKAI M, 1990, NUCL ISTR METH B, V45, P533

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