INVESTIGATION OF THE LIGHT-INDUCED EFFECTS IN NITROGEN-RICH SILICON-NITRIDE FILMS

被引：38

作者：

JOUSSE, D

KANICKI, J

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 11期

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D O I：

10.1063/1.101673

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1112 / 1114

页数：3

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