A STUDY ON THERMALLY INDUCED MICRODEFECTS IN CZOCHRALSKI-GROWN SILICON-CRYSTALS - DEPENDENCE ON ANNEALING TEMPERATURE AND STARTING MATERIALS

被引：61

作者：

MATSUSHITA, Y

KISHINO, S

KANAMORI, M

机构：

来源：

关键词：

D O I：

10.1143/JJAP.19.L101

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L101 / L104

页数：4

共 16 条

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