ISOTOPIC MASS EFFECTS IN SPUTTERING - DEPENDENCE ON FLUENCE AND EMISSION ANGLE

被引：34

作者：

GNASER, H

OECHSNER, H

机构：

[1] Fachbereich Physik, Universität Kaiserslautern

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 48卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(90)90179-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The isotopic composition of the flux of sputtered neutrals was measured for low primary-beam fluence increments (< 1 × 1015 Ar-ions/cm2) and different emission angles (0 ° to 80 °) by means of sputtered-neutral mass spectrometry. For germanium and molybdenum, the sputtered flux is initially enriched in the lighter isotopes by a factor of about 1.05 for two isotopes with a relative difference in mass of 8%. This initial enrichment gradually decreases during sample erosion and a steady-state value is reached upon sputter removal of a layer of 10-15 nm. The light-isotope enrichment is independent of the emission angle from 0° to about 60°, but is slightly smaller for larger angles. © 1990.

引用

页码：544 / 548

页数：5

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