A MODEL FOR THE TIME-DEPENDENCE AND BIAS-DEPENDENCE OF P-MOSFET DEGRADATION

被引:33
作者
BROX, M
SCHWERIN, A
WANG, Q
WEBER, W
机构
[1] SIEMENS & MATSUSHITA, MUNICH, GERMANY
[2] SIEMENS AG, CORP RES & DEV, D-81739 MUNICH, GERMANY
关键词
D O I
10.1109/16.293346
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Physical properties of both electron trapping and detrapping are identified to influence the degradation behavior of p-MOS transistors. Focusing on electron trapping first, we find as a decisive feature a spatially growing region of filled traps in the vicinity of the drain. Due to an exponential decrease of the electron injection current as a function of distance to the drain, its length grows logarithmically over time resulting in a logarithmic time dependence of the degradation. The logarithmic growth of this region is proven by means of charge-pumping experiments, whereas the logarithmic time dependence of the degradation itself is readily visible in the transistor current. Including electron-detrapping, the model permits a consistent description of both time- and bias-dependence of the degradation thereby leading to an improved expression for the lifetime of p-MOS transistors.
引用
收藏
页码:1184 / 1196
页数:13
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