SUPPRESSION OF BE DIFFUSION IN MOLECULAR-BEAM EPITAXY ALGAAS BY THE INCORPORATION OF IN FOR HETEROJUNCTION BIPOLAR-TRANSISTOR APPLICATIONS

被引:6
作者
FUJII, T
TOMIOKA, T
ISHIKAWA, H
SASA, S
ENDOH, A
BAMBA, Y
ISHII, K
KATAOKA, Y
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 02期
关键词
D O I
10.1116/1.584843
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:154 / 156
页数:3
相关论文
共 6 条
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