PRINCIPLES OF PLASMA-ACTIVATED CHEMICAL VAPOR-DEPOSITION

被引：20

作者：

INSPEKTORKOREN, A

机构：

来源：

SURFACE & COATINGS TECHNOLOGY | 1987年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0257-8972(87)90174-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：31 / 48

页数：18

共 141 条

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