EFFECT OF CIRCUIT STRUCTURE ON PLANARIZATION RESIST THICKNESS

被引：28

作者：

WILSON, RH

PIACENTE, PA

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 05期

关键词：

D O I：

10.1149/1.2108781

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：981 / 984

页数：4

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