KEV PARTICLE BOMBARDMENT OF SEMICONDUCTORS - A MOLECULAR-DYNAMICS SIMULATION

被引：147

作者：

SMITH, R ^{[1
]}

HARRISON, DE ^{[1
]}

GARRISON, BJ ^{[1
]}

机构：

[1] PENN STATE UNIV,DEPT CHEM,UNIVERSITY PK,PA 16802

来源：

PHYSICAL REVIEW B | 1989年 / 40卷 / 01期

关键词：

D O I：

10.1103/PhysRevB.40.93

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：93 / 101

页数：9

相关论文

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