AN ELECTRON UNDULATING RING DEDICATED TO VLSI LITHOGRAPHY

被引：11

作者：

TOMIMASU, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 05期

关键词：

D O I：

10.1143/JJAP.26.741

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：741 / 746

页数：6

共 12 条

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[10] AN ELECTRON UNDULATING RING FOR VLSI LITHOGRAPHY [J].

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