POSITRON STUDIES OF METAL-OXIDE-SEMICONDUCTOR STRUCTURES

被引：23

作者：

AU, HL ^{[1
]}

ASOKAKUMAR, P ^{[1
]}

NIELSEN, B ^{[1
]}

LYNN, KG ^{[1
]}

机构：

[1] UNIV HONG KONG,DEPT PHYS,HONG KONG,HONG KONG

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 73卷 / 06期

关键词：

D O I：

10.1063/1.353029

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Positron annihilation spectroscopy provides a new probe to study the properties of interface traps in metal-oxide semiconductors (MOS). Using positrons, we have examined the behavior of the interface traps as a function of gate bias. We propose a simple model to explain the positron annihilation spectra from the interface region of a MOS capacitor.

引用

页码：2972 / 2976

页数：5

共 18 条

[1] SIO2/SI INTERFACE PROPERTIES USING POSITRONS
ASOKAKUMAR, P
LYNN, KG
LEUNG, TC
NIELSEN, B
RUBLOFF, GW
WEINBERG, ZA
[J]. PHYSICAL REVIEW B, 1991, 44 (11): : 5885 - 5888
[2] STUDY OF HYDROGEN INTERACTION WITH SIO2/SI(100) SYSTEM USING POSITRONS
ASOKAKUMAR, P
LYNN, KG
LEUNG, TC
NIELSEN, B
WU, XY
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (09) : 6603 - 6606
[3] THE STUDY OF SUB-SURFACE AND INTERFACE CHARACTERISTICS OF SEMICONDUCTOR HETEROSTRUCTURES BY SLOW POSITRON IMPLANTATION SPECTROSCOPY
BAKER, JA
COLEMAN, PG
[J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 1989, 1 : SB39 - SB44
[4] OXYGEN IN SILICON - A POSITRON-ANNIHILATION INVESTIGATION
DANNEFAER, S
KERR, D
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (04) : 1313 - 1321
[5] INTERFACE TRAPS AND PB CENTERS IN OXIDIZED (100) SILICON-WAFERS
GERARDI, GJ
POINDEXTER, EH
CAPLAN, PJ
JOHNSON, NM
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (06) : 348 - 350
[6] Hautojarvi P., 1979, POSITRONS SOLIDS
[7] DEPTH PROFILING OF HYDROGEN PASSIVATION OF BORON IN SI(100)
HUANG, LJ
LAU, WM
SIMPSON, PJ
SCHULTZ, PJ
[J]. PHYSICAL REVIEW B, 1992, 46 (07): : 4086 - 4091
[8] POSITRON-ANNIHILATION AT THE SI/SIO2 INTERFACE
LEUNG, TC
WEINBERG, ZA
ASOKAKUMAR, P
NIELSEN, B
RUBLOFF, GW
LYNN, KG
[J]. JOURNAL OF APPLIED PHYSICS, 1992, 71 (01) : 530 - 532
[9] DEVELOPMENT AND USE OF A THIN-FILM TRANSMISSION POSITRON MODERATOR
LYNN, KG
NIELSEN, B
QUATEMAN, JH
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (03) : 239 - 240
[10] LYNN KG, 1991, INT MATER REV, V36, P1

← 1 2 →