ENHANCED THERMAL DONOR FORMATION AND OXYGEN DIFFUSION IN SILICON EXPOSED TO A HYDROGEN PLASMA

被引：27

作者：

MURRAY, R

BROWN, AR

NEWMAN, RC

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 4卷 / 1-4期

关键词：

D O I：

10.1016/0921-5107(89)90261-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：299 / 302

页数：4

共 17 条

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[9] THERMAL DONORS IN SILICON - OXYGEN CLUSTERS OR SELF-INTERSTITIAL AGGREGATES [J].

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