SHAPE OF CATHODE DARK SPACE OF A SPUTTERING PLASMA DETERMINED FROM PROBE MEASUREMENTS

被引：8

作者：

LARSEN, WR ^{[1
]}

WILMSEN, CW ^{[1
]}

CHAN, PW ^{[1
]}

机构：

[1] COLORADO STATE UNIV,DEPT ELECT ENGN,FORT COLLINS,CO 80521

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 05期

关键词：

D O I：

10.1063/1.1662528

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2153 / 2156

页数：4

共 12 条

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[8] EFFECTS OF CONTAMINATION ON LANGMUIR PROBE MEASUREMENTS IN GLOW DISCHARGE PLASMAS [J].

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