DEFECT REDUCTION EFFECTS IN GAAS ON SI SUBSTRATES BY THERMAL ANNEALING

被引:177
作者
YAMAGUCHI, M
YAMAMOTO, A
TACHIKAWA, M
ITOH, Y
SUGO, M
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10.1063/1.100257
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O59 [应用物理学];
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页码:2293 / 2295
页数:3
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