AMORPHOUS-CARBON PHYSICALLY VAPOR-DEPOSITED COATINGS

被引：14

作者：

KNOTEK, O ^{[1
]}

LOFFLER, F ^{[1
]}

BRAND, J ^{[1
]}

BURGMER, W ^{[1
]}

机构：

[1] MULTI ARC OBERFLACHENTECH GMBH,W-5060 BERGISCH GLADBAC 1,GERMANY

来源：

SURFACE & COATINGS TECHNOLOGY | 1991年 / 49卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(91)90085-B

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Amorphous diamond-like carbon (ADLC) coatings were deposited onto cemented carbides using arc-ion-plating. The paper describes both the problems and the potential of this process with its many influencing parameters. It also details a number of properties of arc ADLC films, deposited at coating temperatures of 200 C, which are important for tribological applications.

引用

页码：370 / 373

页数：4

共 10 条

[1]

Angus J.C., 1986, PLASMA DEPOSITED THI, P89

[2] EMPIRICAL CATEGORIZATION AND NAMING OF DIAMOND-LIKE CARBON-FILMS [J].

ANGUS, JC .

THIN SOLID FILMS, 1986, 142 (01) :145-151

[3]

ANGUS JC, 1988, ARTICLES, V19, P913

[4] STRUCTURE AND PHYSICAL-PROPERTIES OF PLASMA-GROWN AMORPHOUS HYDROGENATED CARBON-FILMS [J].

COUDERC, P ;

CATHERINE, Y .

THIN SOLID FILMS, 1987, 146 (01) :93-107

[5] CHARACTERIZATION OF AMORPHOUS CARBON-HYDROGEN FILMS BY SOLID-STATE NUCLEAR MAGNETIC-RESONANCE [J].

KAPLAN, S ;

JANSEN, F ;

MACHONKIN, M .

APPLIED PHYSICS LETTERS, 1985, 47 (07) :750-753

[6] CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY [J].

KNIGHT, DS ;

WHITE, WB .

JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) :385-393

[7] STRUCTURE OF ION-PLATED AMORPHOUS HYDROGENATED CARBON-FILMS INVESTIGATED BY ELECTRON-ENERGY LOSS SPECTROSCOPY [J].

MUHLING, I ;

BEWILOGUA, K ;

BREUER, K .

THIN SOLID FILMS, 1990, 187 (01) :65-75

[8] STRESS RELIEF FORMS OF DIAMOND-LIKE CARBON THIN-FILMS UNDER INTERNAL COMPRESSIVE STRESS [J].

NIR, D .

THIN SOLID FILMS, 1984, 112 (01) :41-49

[9] FRICTION AND WEAR PROPERTIES OF THIN-FILMS OF CARBON WITH DIAMOND STRUCTURE PREPARED BY IONIZED DEPOSITION [J].

OKADA, K ;

NAMBA, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02) :132-135

[10] CATHODIC ARC EVAPORATION OF GRAPHITE WITH CONTROLLED CATHODE SPOT POSITION [J].

ROTHER, B ;

SIEGEL, J ;

VETTER, J .

THIN SOLID FILMS, 1990, 188 (02) :293-300

← 1 →