STUDY OF LUMINESCENT REGION IN ANODIZED POROUS SILICONS BY PHOTOLUMINESCENCE IMAGING AND THEIR MICROSTRUCTURES

被引:37
作者
NOGUCHI, N [1 ]
SUEMUNE, I [1 ]
YAMANISHI, M [1 ]
HUA, GC [1 ]
OTSUKA, N [1 ]
机构
[1] PURDUE UNIV,SCH MAT ENGN,W LAFAYETTE,IN 47907
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1992年 / 31卷 / 4B期
关键词
POROUS SILICON; ANODIZATION; LUMINESCENCE; IMAGING; MICROSTRUCTURES;
D O I
10.1143/JJAP.31.L490
中图分类号
O59 [应用物理学];
学科分类号
摘要
The luminescent region in anodized porous silicon was examined by means of a photoluminescence imaging technique. It was found for the first time that the luminescence in the visible region originates from the topmost surface layer. This was confirmed not only by the surface photoexcitation but also by the excitation of the cleaved edge. This topmost surface layer does not show any diffraction spots with transmission-electron microscopy and is regarded as an amorphous layer. The microstructure of this layer observed by means of secondary-electron microscope (SEM) consisted of microparticles with the dimensions of 5 approximately 30 nm, where the tower dimension is limited by the SEM resolution.
引用
收藏
页码:L490 / L493
页数:4
相关论文
共 9 条
  • [1] AN EXPERIMENTAL AND THEORETICAL-STUDY OF THE FORMATION AND MICROSTRUCTURE OF POROUS SILICON
    BEALE, MIJ
    BENJAMIN, JD
    UREN, MJ
    CHEW, NG
    CULLIS, AG
    [J]. JOURNAL OF CRYSTAL GROWTH, 1985, 73 (03) : 622 - 636
  • [2] SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS
    CANHAM, LT
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (10) : 1046 - 1048
  • [3] PREFERENTIAL PROPAGATION OF PORES DURING THE FORMATION OF POROUS SILICON - A TRANSMISSION ELECTRON-MICROSCOPY STUDY
    CHUANG, SF
    COLLINS, SD
    SMITH, RL
    [J]. APPLIED PHYSICS LETTERS, 1989, 55 (07) : 675 - 677
  • [4] 3-DIMENSIONAL QUANTUM WELL EFFECTS IN ULTRAFINE SILICON PARTICLES
    FURUKAWA, S
    MIYASATO, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (11): : L2207 - L2209
  • [5] ELECTROLUMINESCENCE IN THE VISIBLE RANGE DURING ANODIC-OXIDATION OF POROUS SILICON FILMS
    HALIMAOUI, A
    OULES, C
    BOMCHIL, G
    BSIESY, A
    GASPARD, F
    HERINO, R
    LIGEON, M
    MULLER, F
    [J]. APPLIED PHYSICS LETTERS, 1991, 59 (03) : 304 - 306
  • [6] EFFICIENT VISIBLE PHOTOLUMINESCENCE FROM POROUS SILICON
    KOSHIDA, N
    KOYAMA, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (7B): : L1221 - L1223
  • [7] POROUS SILICON FORMATION - A QUANTUM WIRE EFFECT
    LEHMANN, V
    GOSELE, U
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (08) : 856 - 858
  • [8] SUEMUNE I, 1992, IN PRESS JPN J APPL, V31
  • [9] EFFICIENT VISIBLE PHOTO-LUMINESCENCE IN THE BINARY A-SI-HX ALLOY SYSTEM
    WOLFORD, DJ
    REIMER, JA
    SCOTT, BA
    [J]. APPLIED PHYSICS LETTERS, 1983, 42 (04) : 369 - 371