共 11 条
[2]
MECHANISMS FOR SUCCESS OR FAILURE OF DIFFUSION-BARRIERS BETWEEN ALUMINUM AND SILICON
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:875-880
[4]
EVALUATION OF INTERNAL-STRESS IN REACTIVELY SPUTTER-DEPOSITED ZRN THIN-FILMS
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1991, 30 (07)
:1463-1468
[6]
KITTEL C, 1971, INTRO SOLID STATE PH, P127