MECHANISMS FOR SUCCESS OR FAILURE OF DIFFUSION-BARRIERS BETWEEN ALUMINUM AND SILICON

被引:35
作者
HARPER, JME
HORNSTROM, SE
THOMAS, O
CHARAI, A
KRUSINELBAUM, L
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词
D O I
10.1116/1.575814
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:875 / 880
页数:6
相关论文
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