INCONGRUENT SPUTTERING IN METAL-OXIDES

被引：5

作者：

LANGELL, MA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 28卷 / 04期

关键词：

D O I：

10.1016/0168-583X(87)90495-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：502 / 508

页数：7

共 34 条

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