OPTICAL-PROPERTIES OF RUO2 FILMS DEPOSITED BY REACTIVE SPUTTERING

被引：41

作者：

BELKIND, A

ORBAN, Z

VOSSEN, JL

WOOLLAM, JA

机构：

[1] UNIV NEBRASKA,LINCOLN,NE 68588

[2] JOHN VOSSEN ASSOCIATES INC,BRIDGEWATER,NJ 08807

来源：

THIN SOLID FILMS | 1992年 / 207卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90131-T

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ruthenium dioxide, RuO2, belongs to the family of transition metal compounds of the platinum group and has unique environmental stability. Owing to its combination of extreme physical and chemical properties, RuO2 films are of great academic and practical interest. RuO2 films were deposited by d.c. reactive sputtering in an in-line sputtering system on a dynamic substrate. The resistivity and optical properties of the films were investigated. The optical and dielectric constants of RuO2 films were determined using spectroscopic ellipsometry and spectrophotometry.

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页码：242 / 247

页数：6

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