REACTIVE SPUTTERING OF RUO2 FILMS

被引：60

作者：

KOLAWA, E

SO, FCT

FLICK, W

ZHAO, XA

PAN, ETS

NICOLET, MA

机构：

来源：

THIN SOLID FILMS | 1989年 / 173卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90137-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：217 / 224

页数：8

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[8] REACTIVELY SPUTTERED RUO2 DIFFUSION-BARRIERS
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