A HYBRID METHOD FOR DETERMINATION OF OPTICAL THIN-FILM CONSTANTS

被引：24

作者：

STENZEL, O

PETRICH, R

SCHARFF, W

HOPFE, V

TIKHONRAVOV, AV

机构：

[1] CHEMNITZ UNIV TECHNOL,DEPT CHEM,O-9010 KARL MARX STADT,GERMANY

[2] MV LOMONOSOV STATE UNIV,DEPT PHYS,MOSCOW 119899,USSR

来源：

THIN SOLID FILMS | 1992年 / 207卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90145-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new method for optical thin film constant determination from spectrophotometric data is presented. The method combines features of single-wavelength methods as well as multiwavelength methods and thus represents a hybrid method specially designed for the analysis of amorphous thin film materials with more or less involved absorption behaviour, such as amorphous hydrogenated carbon (a-C:H), amorphous hydrogenated silicon (a-Si:H) and related materials. The unambiguity and continuity of solution contours are guaranteed without the postulation of any analytical dispersion law, by introducing specially constructed mathematical terms into the merit function to be minimized. The accuracy in determining refractive indices and film thicknesses is comparable to that achieved by curve-fitting methods. Weak inhomogeneities in film thickness may be taken into account.

引用

收藏

页码：324 / 329

页数：6

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