PHYSICAL SPUTTERING OF LOW-Z MATERIALS

被引:29
作者
GAUTHIER, E
ECKSTEIN, W
LASZLO, J
ROTH, J
机构
[1] Max-Planck-Institut für Plasmaphysik, Euratom Association, München
关键词
D O I
10.1016/0022-3115(90)90086-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A compilation of physical sputtering under deuterium bombardment is presented for various low-Z materials and compared with results from computer simulation. To evaluate the self-sputtering yield of these materials we performed carbon ion bombardment at a grazing angle. We also investigate the radiation enhanced sublimation of these materials in experiments at high temperatures up to 1850 K. Radiation-enhanced sublimation can be avoided in boron carbide up to 1700 K under deuterium ion bombardment, but not under carbon ion bombardment. This is interpreted as an effect of material modification of the surface layer due to carbon enrichment.
引用
收藏
页码:438 / 444
页数:7
相关论文
共 16 条
[1]   SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].
BIERSACK, JP ;
ECKSTEIN, W .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94
[2]  
BOHDANSIKY J, 1988, FUSION TECHNOL, P889
[3]  
BOHDANSKY J, 1984, NUCL FUSION, P65
[4]  
ECKSTEIN W, IN PRESS FUSION TECH
[5]  
GAUTHIER E, IN PRESS J NUCL MATE
[6]   DECELERATION ION OPTICAL-SYSTEM FOR SPUTTERING MEASUREMENTS BETWEEN 50 AND 500 EV AS FUNCTION OF ANGLE OF INCIDENCE [J].
LIEBL, H ;
BOHDANSKY, J ;
ROTH, J ;
DOSE, V .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (10) :1830-1832
[7]   UNITY YIELD CONDITIONS FOR SPUTTERING OF GRAPHITE BY CARBON-IONS [J].
ROTH, J ;
BOHDANSKY, J ;
OTTENBERGER, W .
JOURNAL OF NUCLEAR MATERIALS, 1989, 165 (03) :193-198
[8]   MECHANISM OF ENHANCED SPUTTERING OF CARBON AT TEMPERATURES ABOVE 1200-DEGREES-C [J].
ROTH, J ;
MOLLER, W .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :788-792
[9]   EROSION AND IMPURITY PRODUCTION OF C AND BE - A COMPARISON [J].
ROTH, J .
JOURNAL OF NUCLEAR MATERIALS, 1987, 145 :87-95
[10]   EROSION OF CARBON DUE TO BOMBARDMENT WITH ENERGETIC IONS AT TEMPERATURES UP TO 2000-K [J].
ROTH, J ;
BOHDANSKY, J ;
WILSON, KL .
JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :775-780