SURFACE COPPER CONTAMINATION OF AS-RECEIVED FLOAT-ZONE SILICON-WAFERS

被引：16

作者：

CANHAM, LT

DYBALL, MR

BARRACLOUGH, KG

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.343521

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：920 / 927

页数：8

共 27 条

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