AUGER-ELECTRON SPECTROSCOPY STUDY OF GAAS SUBSTRATE CLEANING PROCEDURES

被引：17

作者：

ZILKO, JL

WILLIAMS, RS

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 02期

关键词：

D O I：

10.1149/1.2123868

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：406 / 408

页数：3

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