DEFLECTION OF A SUBSTRATE-INDUCED BY AN ANISOTROPIC THIN-FILM STRESS

被引：46

作者：

VANDERIET, E

机构：

[1] Philips Research Laboratories, 5656 AA Eindhoven

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 01期

关键词：

D O I：

10.1063/1.358434

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The deflection of a substrate caused by an anisotropic stress in a thin film that is deposited on it, is studied theoretically. An exact solution of the elastic equations for the three-dimensional cantilever problem is found. Equations for the deflection caused by anisotropic stresses due to, e.g., magnetostriction and by isotropic stresses are given. A comparison is made between these equations and the equations usually given in the literature for the determination of thin-film stresses.

引用

页码：584 / 586

页数：3

共 13 条

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