ON THE UNIFORMITY OF THIN A-SI-H FILMS PREPARED IN AN RF-GLOW DISCHARGE SYSTEM

被引：2

作者：

MYBURG, G ^{[1
]}

SWANEPOEL, R ^{[1
]}

机构：

[1] RAND AFRIKAANS UNIV,DEPT PHYS,JOHANNESBURG,SOUTH AFRICA

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 06期

关键词：

D O I：

10.1143/JJAP.27.899

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：899 / 907

页数：9

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