REDUCED HOT-CARRIER RELIABILITY DEGRADATION OF X-RAY-IRRADIATED MOSFETS IN A 0.25 MU-M CMOS TECHNOLOGY WITH ULTRA-THIN GATE OXIDE

被引:6
作者
ACOVIC, A [1 ]
HSU, CCH [1 ]
HSIA, LC [1 ]
AITKEN, JM [1 ]
机构
[1] IBM CORP,GTD,FISHKILL,NY 12533
关键词
D O I
10.1016/0038-1101(93)90177-R
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
[No abstract available]
引用
收藏
页码:1353 / 1355
页数:3
相关论文
共 16 条
[1]   EFFECTS OF X-RAY-IRRADIATION ON GIDL IN MOSFETS [J].
ACOVIC, A ;
HSU, CCH ;
HSIA, LC ;
BALASINSKI, A ;
MA, TP .
IEEE ELECTRON DEVICE LETTERS, 1992, 13 (04) :189-191
[2]   ELECTRON TRAPPING IN ELECTRON-BEAM IRRADIATED SIO2 [J].
AITKEN, JM ;
YOUNG, DR ;
PAN, K .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (06) :3386-3391
[3]   1 MU-M MOSFET VLSI TECHNOLOGY .8. RADIATION EFFECTS [J].
AITKEN, JM .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1979, 14 (02) :294-301
[4]   HOLE REMOVAL IN THIN-GATE MOSFETS BY TUNNELING [J].
BENEDETTO, JM ;
BOESCH, HE ;
MCLEAN, FB ;
MIZE, JP .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1985, 32 (06) :3916-3920
[5]  
DAVARI B, 1988, P IEDM 88, P56
[6]  
HANAFI HI, 1988, P ESSDERC 87, P21
[7]   CONSISTENT MODEL FOR THE HOT-CARRIER DEGRADATION IN N-CHANNEL AND P-CHANNEL MOSFETS [J].
HEREMANS, P ;
BELLENS, R ;
GROESENEKEN, G ;
MAES, HE .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (12) :2194-2209
[8]   HOT-ELECTRON-INDUCED INSTABILITY IN 0.5-MU-M P-CHANNEL MOSFETS PATTERNED USING SYNCHROTRON X-RAY-LITHOGRAPHY [J].
HSU, CCH ;
WANG, LK ;
WORDEMAN, MR ;
NING, TH .
IEEE ELECTRON DEVICE LETTERS, 1989, 10 (07) :327-329
[9]   RADIATION-DAMAGE AND ITS EFFECT ON HOT-CARRIER INDUCED INSTABILITY OF 0.5-MU-M CMOS DEVICES PATTERNED USING SYNCHROTRON X-RAY-LITHOGRAPHY [J].
HSU, CCH ;
WANG, LK ;
SUN, JYC ;
WORDEMAN, MR ;
NING, TH .
JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (07) :721-725
[10]  
HSUCCH, 1989, P IEDM 89, P75