EFFECT OF SUBSTRATE BIAS ON THE PROTECTIVE PROPERTIES OF TIN FILMS GROWN BY REACTIVE MAGNETRON SPUTTERING ONTO CU SUBSTRATES

被引：13

作者：

BENHENDA, S

GUGLIELMACCI, JM

GILLET, M

HULTMAN, L

SUNDGREN, JE

机构：

[1] FAC SCI & TECH ST JEROME,CNRS,MICROSCOPIE & DIFFRACT ELECTR LAB,UA 797,F-13397 MARSEILLE 13,FRANCE

[2] LINKOPING UNIV,DEPT PHYS,THIN FILM GRP,S-58183 LINKOPING,SWEDEN

来源：

APPLIED SURFACE SCIENCE | 1989年 / 40卷 / 1-2期

关键词：

D O I：

10.1016/0169-4332(89)90166-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：121 / 128

页数：8

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