TIME-DEPENDENT INTERFACE TRAP EFFECTS IN MOS DEVICES

被引：49

作者：

BOESCH, HE

机构：

[1] Harry Diamond Lab, Adelphi, MD, USA

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1988年 / 35卷 / 06期

关键词：

Electronic Properties - Semiconducting Silicon - Silica;

D O I：

10.1109/23.25434

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fast charge-pumping technique was used to measure the radiation- induced buildup of interface traps in MOS structures after exposure to short-pulse irradiation. A strong dependence of the time scale of the late-time buildup (t > 10 ms) on the oxide electric field at very early times (10 μs to 0.5 ms) is explained in terms of a positive-ion-drift model. The early-time buildup (t 2/Si interface.

引用

页码：1160 / 1167

页数：8

共 28 条

[1] BOESCH HE, 1982, IEEE T NUCL SCI, V29, P1446
[2] INTERFACE STATE GENERATION ASSOCIATED WITH HOLE TRANSPORT IN METAL-OXIDE-SEMICONDUCTOR STRUCTURES
BOESCH, HE
MCLEAN, FB
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) : 448 - 449
[3] HOLE TRANSPORT AND TRAPPING IN FIELD OXIDES
BOESCH, HE
MCLEAN, FB
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1985, 32 (06) : 3940 - 3945
[4] BOESCH HE, 1982, 1982 SEM INT SPEC C
[5] THERMAL ANNEALING OF RADIATION-INDUCED DEFECTS - A DIFFUSION-LIMITED PROCESS
BROWN, DB
MA, DI
DOZIER, CM
PECKERAR, MC
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (06) : 4059 - 4063
[6] PHOTON ENERGY-DEPENDENCE OF RADIATION EFFECTS IN MOS STRUCTURES
DOZIER, CM
BROWN, DB
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1980, 27 (06) : 1694 - 1699
[7] DIFFUSION OF RADIOLYTIC MOLECULAR-HYDROGEN AS A MECHANISM FOR THE POST-IRRADIATION BUILDUP OF INTERFACE STATES IN SIO2-ON-SI STRUCTURES
GRISCOM, DL
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (07) : 2524 - 2533
[8] GRISCOM DL, 1984, 1984 SEM INT SPEC C
[9] A RELIABLE APPROACH TO CHARGE-PUMPING MEASUREMENTS IN MOS-TRANSISTORS
GROESENEKEN, G
MAES, HE
BELTRAN, N
DEKEERSMAECKER, RF
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (01) : 42 - 53
[10] GENERATION OF OXIDE CHARGE AND INTERFACE STATES BY IONIZING-RADIATION AND BY TUNNEL INJECTION EXPERIMENTS
KNOLL, M
BRAUNIG, D
FAHRNER, WR
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1982, 29 (06) : 1471 - 1478

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