TEMPERATURE-MEASUREMENTS OF POLYMER SUBSTRATES (PMMA) IN AN RF DISCHARGE

被引：8

作者：

ROCHOTZKI, R

FRIEDRICH, M

机构：

来源：

IEE PROCEEDINGS-A-SCIENCE MEASUREMENT AND TECHNOLOGY | 1992年 / 139卷 / 02期

关键词：

PLASMAS; DISCHARGES; ELECTRIC; TEMPERATURE;

D O I：

10.1049/ip-a-3.1992.0012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The influence of pressure and applied power on the temperature of polymer substrates (PMMA material) in an RF discharge is studied with the help of laser interferometry. The evaluation of the temperature curves shows that the heat flux from the plasma towards the substrate differs significantly from the applied power. The temperature distribution over the substrate thickness is simulated numerically using the method of finite differences.

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收藏

页码：61 / 64

页数：4

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