HIGH-PERFORMANCE INP/GA0.47IN0.53AS/INP METAL-SEMICONDUCTOR-METAL PHOTODETECTORS WITH A STRAINED AL0.1IN0.9P BARRIER ENHANCEMENT LAYER

被引:10
作者
CHAN, PT [1 ]
CHOY, HS [1 ]
SHU, C [1 ]
HSU, CC [1 ]
机构
[1] CHINESE UNIV HONG KONG,DEPT ELECTR ENGN,SHA TIN,HONG KONG
关键词
D O I
10.1063/1.115026
中图分类号
O59 [应用物理学];
学科分类号
摘要
A reduction in the dark current and an enhancement of the breakdown voltage have been observed in interdigitated InP/Ga0.47In0.53As/InP metal-semiconductor-metal photodetectors when a cap layer of Al0.1In0.9P was grown on the epitaxial structure to increase the Schottky barrier. The devices had a de responsivity of 0.32 A/W and an intrinsic response faster than 74 ps. (C) 1995 American Institute of Physics.
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页码:1715 / 1717
页数:3
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