MATRIX EFFECTS OF SECONDARY NEUTRALS - LASER POSTIONIZATION INVESTIGATIONS OF PARTICLES SPUTTERED FROM CLEAN AND OXIDIZED METALS

被引：8

作者：

HOMOLKA, P

HUSINSKY, W

NICOLUSSI, G

BETZ, G

LI, X

机构：

[1] Institut für Allgemeine Physik, Technische Universität Wien, A-1040, Wien

来源：

PHYSICAL REVIEW B | 1995年 / 51卷 / 07期

关键词：

D O I：

10.1103/PhysRevB.51.4665

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The striking discrepancy between yields of secondary neutral metal atoms previously observed using nonresonant multiphoton ionization of the sputtered secondary flux and laser-induced fluorescence can be explained by performing measurements using resonant postionization of the secondary atoms. The secondary flux from Ti and Cr metal targets under ion-beam bombardment has been investigated for increasing oxygen partial background pressure from 10-10 up to 10-6 mbar. The existence of matrix effects for sputtered neutrals has been verified. © 1995 The American Physical Society.

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页码：4665 / 4667

页数：3

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